{"id":249,"date":"2017-10-02T13:40:50","date_gmt":"2017-10-02T11:40:50","guid":{"rendered":"https:\/\/blogs.uni-paderborn.de\/kbrassat\/?page_id=249"},"modified":"2018-06-21T14:52:09","modified_gmt":"2018-06-21T12:52:09","slug":"formation-of-hierarchical-nanopores-by-combining-nanosphere-and-block-copolymer-lithography","status":"publish","type":"page","link":"https:\/\/blogs.uni-paderborn.de\/kbrassat\/formation-of-hierarchical-nanopores-by-combining-nanosphere-and-block-copolymer-lithography\/","title":{"rendered":"Hierarchical nanopores by combined nanosphere- and block copolymer lithography"},"content":{"rendered":"<div class=\"twoclick_social_bookmarks_post_249 social_share_privacy clearfix 1.6.4 locale-de_DE sprite-de_DE\"><\/div><div class=\"twoclick-js\"><script type=\"text\/javascript\">\/* <![CDATA[ *\/\njQuery(document).ready(function($){if($('.twoclick_social_bookmarks_post_249')){$('.twoclick_social_bookmarks_post_249').socialSharePrivacy({\"txt_help\":\"Wenn Sie diese Felder durch einen Klick aktivieren, werden Informationen an Facebook, Twitter, Flattr, Xing, t3n, LinkedIn, Pinterest oder Google eventuell ins Ausland \\u00fcbertragen und unter Umst\\u00e4nden auch dort gespeichert. N\\u00e4heres erfahren Sie durch einen Klick auf das <em>i<\\\/em>.\",\"settings_perma\":\"Dauerhaft aktivieren und Daten\\u00fcber-tragung zustimmen:\",\"info_link\":\"http:\\\/\\\/www.heise.de\\\/ct\\\/artikel\\\/2-Klicks-fuer-mehr-Datenschutz-1333879.html\",\"uri\":\"https:\\\/\\\/blogs.uni-paderborn.de\\\/kbrassat\\\/formation-of-hierarchical-nanopores-by-combining-nanosphere-and-block-copolymer-lithography\\\/\",\"post_id\":249,\"post_title_referrer_track\":\"Hierarchical+nanopores+by+combined+nanosphere-+and+block+copolymer+lithography\",\"display_infobox\":\"on\"});}});\n\/* ]]> *\/<\/script><\/div><p><a href=\"http:\/\/pubs.rsc.org\/en\/content\/articlelanding\/2018\/nr\/c8nr01397g\/unauth#!divAbstract\">See our latest paper on this project!<\/a><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-large wp-image-500\" src=\"https:\/\/blogs.uni-paderborn.de\/kbrassat\/files\/2017\/10\/Brassat-hierarchical-nanopores-1024x580.png\" alt=\"\" width=\"584\" height=\"331\" srcset=\"https:\/\/blogs.uni-paderborn.de\/kbrassat\/files\/2017\/10\/Brassat-hierarchical-nanopores-1024x580.png 1024w, https:\/\/blogs.uni-paderborn.de\/kbrassat\/files\/2017\/10\/Brassat-hierarchical-nanopores-300x170.png 300w, https:\/\/blogs.uni-paderborn.de\/kbrassat\/files\/2017\/10\/Brassat-hierarchical-nanopores-768x435.png 768w, https:\/\/blogs.uni-paderborn.de\/kbrassat\/files\/2017\/10\/Brassat-hierarchical-nanopores-500x283.png 500w, https:\/\/blogs.uni-paderborn.de\/kbrassat\/files\/2017\/10\/Brassat-hierarchical-nanopores.png 1530w\" sizes=\"auto, (max-width: 584px) 100vw, 584px\" \/><\/p>\n<p>We created hierarchical nanopores by prepatterning of the surface via nanosphere lithography (NSL) prior to a block copolymer lithography.<\/p>\n<p>NSL is used in combination with reactive ion etching and subsequent physical vapor deposition of metals (Pt, Ti) in order to form a metal or semiconductor film with an <a href=\"https:\/\/blogs.uni-paderborn.de\/kbrassat\/nanosphere-lithography-2\/\">antidot pattern<\/a>, i.e. a hexagonally close packed arrangement of cylindrical holes. These antidots have typical diameters in the range of few hundred nm.<\/p>\n<p>We then deposit the polymers and perform the microphase-phase separation for the creation of nanopores with tens of nm diameters. We analyze the influence of NSL pre-patterning on the microphase separation process in PS-b-PMMA block copolymers depending on the chemical and topographical morphology of the prepatterns.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>See our latest paper on this project! We created hierarchical nanopores by prepatterning of the surface via nanosphere lithography (NSL) prior to a block copolymer lithography. NSL is used in combination with reactive ion etching and subsequent physical vapor deposition of metals (Pt, Ti) in order to form a metal or semiconductor film with an [&hellip;]<\/p>\n","protected":false},"author":7828,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-249","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/blogs.uni-paderborn.de\/kbrassat\/wp-json\/wp\/v2\/pages\/249","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blogs.uni-paderborn.de\/kbrassat\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/blogs.uni-paderborn.de\/kbrassat\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/blogs.uni-paderborn.de\/kbrassat\/wp-json\/wp\/v2\/users\/7828"}],"replies":[{"embeddable":true,"href":"https:\/\/blogs.uni-paderborn.de\/kbrassat\/wp-json\/wp\/v2\/comments?post=249"}],"version-history":[{"count":6,"href":"https:\/\/blogs.uni-paderborn.de\/kbrassat\/wp-json\/wp\/v2\/pages\/249\/revisions"}],"predecessor-version":[{"id":504,"href":"https:\/\/blogs.uni-paderborn.de\/kbrassat\/wp-json\/wp\/v2\/pages\/249\/revisions\/504"}],"wp:attachment":[{"href":"https:\/\/blogs.uni-paderborn.de\/kbrassat\/wp-json\/wp\/v2\/media?parent=249"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}